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Home › Force-sensing transducers, accelerometers, rate sensors, methods of forming force-sensing transducers, and methods of forming vibrating-beam force transducers

Force-sensing transducers, accelerometers, rate sensors, methods of forming force-sensing transducers, and methods of forming vibrating-beam force transducers

US Patent 6423564 · Granted Jul 23, 2002

Estimated economic value: $14,906,000 ⓘ

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