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Home › Miniaturized capacitor with solid-state dielectric, in particular for integrated semiconductor memories, E.G. DRAMS, and method for fabricating such a capacitor

Miniaturized capacitor with solid-state dielectric, in particular for integrated semiconductor memories, E.G. DRAMS, and method for fabricating such a capacitor

US Patent 6642565 · Granted Nov 4, 2003

Estimated economic value: $231,000 ⓘ

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