Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Structurally supported thin film resonator and method of fabrication

Structurally supported thin film resonator and method of fabrication

US Patent 6635519 · Granted Oct 21, 2003

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substituted aluminum nitride for improved acoustic wave filters2023
Multilayered transient liquid phase bonding2023
Alternative temperature compensating materials to amorphous silica in acoustic w2022
Substituted aluminum nitride for improved acoustic wave filters2021
Packaging structures with improved adhesion and strength2021
Transient liquid phase material bonding and sealing structures and methods of fo2020
Multilayered transient liquid phase bonding2020
Transient liquid phase material bonding and sealing structures and methods of fo2020
Packaging structures with improved adhesion and strength2019
Bulk acoustic wave structure with aluminum copper nitride piezoelectric layer an2015
Systems and methods of operational modes for a transceiver2014
Method of isolation for acoustic resonator device2014