Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Metal oxynitride capacitor barrier layer

Metal oxynitride capacitor barrier layer

US Patent 6631069 · Granted Oct 7, 2003

Estimated economic value: $3,475,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of manufacturing a fabric2020
Manufacturing method of capacitor structure and semiconductor device using the s2015
Low leakage MIM capacitor2013
Method for forming a ruthenium metal layer and a structure comprising the ruthen2013
Polymer-based ferroelectric memory2012
Waveguide for thermo optic device2012
Waveguide for thermo optic device2011
Polymer-based ferroelectric memory2010
Waveguide for thermo optic device2010
Optical integrated circuit2009
Semiconductor device containing an ultra thin dielectric film or dielectric laye2009
Etch stop layer in poly-metal structures2009