Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Semiconductor processing module with integrated feedback/feed forward metrology

Semiconductor processing module with integrated feedback/feed forward metrology

US Patent 6625497 · Granted Sep 23, 2003

Estimated economic value: $28,970,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Synchronization of plasma processing components2025
Synchronization of bias supplies2024
Spatial control of plasma processing environments2024
Control of plasma sheath with bias supplies2024
Spatial monitoring and control of plasma processing environments2023
Synchronization between an excitation source and a substrate bias supply2023
Spatial monitoring and control of plasma processing environments2022
Spatial monitoring and control of plasma processing environments2022
Application of modulating supplies in a plasma processing system2022
Intelligent wearable device, and working assistance method and system based ther2021
Synchronization between an excitation source and a substrate bias supply2021
Application of modulating supplies in a plasma processing system2020