Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Vacuum processing apparatus

Vacuum processing apparatus

US Patent 6599367 · Granted Jul 29, 2003

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for forming metallic tungsten film2005
Method of manufacturing a processing apparatus2003
Method and apparatus for forming a film on an object to be processed2002
Shower head2000