Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Fabrication method of high precision, thermally stable electromagnetic coil vanes

Fabrication method of high precision, thermally stable electromagnetic coil vanes

US Patent 6588090 · Granted Jul 8, 2003

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Remote clamping mechanism via vacuum feedthrough2005
Electron beam position reference system2004
Electron beam lithography apparatus with self actuated vacuum bypass valve2004
Electron scatter in a thin membrane to eliminate detector saturation2003
High performance source for electron beam projection lithography2003
Symmetric blanking for high stability in electron beam exposure systems2002
Target locking system for electron beam lithography2002
Multiple numerical aperture electron beam projection lithography system2002
Calibration target for electron beams2002
Pinhole detector for electron intensity distribution2002
Removable bombardment filament-module for electron beam projection systems2001
Non-contact autofocus height detector for lithography systems2001