Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Stabilized alkaline compositions for cleaning microelectronic substrates

Stabilized alkaline compositions for cleaning microelectronic substrates

US Patent 6585825 · Granted Jul 1, 2003

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Stripping and cleaning compositions for microelectronics2011
Alkaline, post plasma etch/ash residue removers and photoresist stripping compos2010
Stabilized alkaline compositions for cleaning microelectronic substrates2003
Silicate-containing alkaline compositions for cleaning microelectronic substrate2002
Cleaning wafer substrates of metal contamination while maintaining wafer smoothn1999