Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Module classification approach for moving semiconductor wafers in a wafer processing system

Module classification approach for moving semiconductor wafers in a wafer processing system

US Patent 6560507 · Granted May 6, 2003

Estimated economic value: $54,704,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Operational lists for simultaneous wafer scheduling and system event scheduling2005
Operational lists for simultaneous wafer scheduling and system event scheduling2005
Operational lists for simultaneous wafer scheduling and system event scheduling2005
Operational lists for simultaneous wafer scheduling and system event scheduling2005
Module classification approach for moving semiconductor wafers in a wafer proces2003
Module classification approach for moving semiconductor wafers in a wafer proces2003
Module classification approach for moving semiconductor wafers in a wafer proces2003
Module classification approach for moving semiconductor wafers in a wafer proces2003
Multifont optical character recognition using a box connectivity approach1996