Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6889110 | Operational lists for simultaneous wafer scheduling and system event scheduling | Jaideep Jain, Stanley P. Liu, Janet E. Yi, Sofya B. Malitsky, Thomas Hentschel | 2005-05-03 |
| 6665584 | Module classification approach for moving semiconductor wafers in a wafer processing system | Sofya B. Malitsky, Stanley P. Liu, Janet E. Yi | 2003-12-16 |
| 6560507 | Module classification approach for moving semiconductor wafers in a wafer processing system | Sofya B. Malitsky, Stanley P. Liu, Janet E. Yi | 2003-05-06 |