Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Non-subliming, difunctionalized ultraviolet dyes for use in anti-reflective coatings

Non-subliming, difunctionalized ultraviolet dyes for use in anti-reflective coatings

US Patent 6555287 · Granted Apr 29, 2003

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Dry adhesive for temporary bonding of semiconductor devices2025
Organic anti-reflective coating compositions for advanced microlithography2010
Anti-reflective coatings and dual damascene fill compositions comprising styrene2009
Non-aromatic chromophores for use in polymer anti-reflective coatings2006
Anti-reflective coating composition with improved spin bowl compatibility2005
Anti-reflective coatings and dual damascene fill compositions comprising styrene2005
Organic anti-reflective coating compositions for advanced microlithography2005