Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Single substrate load lock with offset cool module and buffer chamber

Single substrate load lock with offset cool module and buffer chamber

US Patent 6530732 · Granted Mar 11, 2003

Estimated economic value: $4,970,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

System and method to reduce fuel cut enrichment NOx emissions2025
Shield for filament in an ion source2024
Scalable motion control system2019
Electrode, accelerator column and ion implantation apparatus including same2017
Scalable motion control system2015
Scalable motion control system2011
Dual plate gas assisted heater module2001
Dual plate gas assisted heater module2001
Dual plate gas assisted heater module2000
Dual plate gas assisted heater module2000
Robot mounting de-coupling technique1999