Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12046443 | Shield for filament in an ion source | Klaus Becker, Luigi G. Amato, Elvis Gomez, David Burgdorf, Thomas Stewart | 2024-07-23 |
| 9807864 | Electrode, accelerator column and ion implantation apparatus including same | Christopher Lupoli, Sheri A. Durgin, Daniel McGillicuddy, Klaus Becker | 2017-10-31 |
| 6530732 | Single substrate load lock with offset cool module and buffer chamber | Mark Ives | 2003-03-11 |
| 6231289 | Dual plate gas assisted heater module | Mark Ives | 2001-05-15 |
| 6079928 | Dual plate gas assisted heater module | Mark Ives | 2000-06-27 |
| 5931626 | Robot mounting de-coupling technique | — | 1999-08-03 |