Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for enhancing anti-reflective coatings used in photolithography of electronic devices

Method for enhancing anti-reflective coatings used in photolithography of electronic devices

US Patent 6527867 · Granted Mar 4, 2003

Estimated economic value: $3,322,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Low leakage FINFETs2013
Method and system for creating self-aligned twin wells with co-planar surfaces i2012
Method and system for reducing inter-layer capacitance in integrated circuits2011
Method and apparatus for modeling long-range EUVL flare2011
Electrostatic discharge (ESD) protection structure and a circuit using the same2010
LOCOS self-aligned twin well with a co-planar silicon surface2010
Method and materials to control doping profile in integrated circuit substrate m2009
Method for forming a self-aligned twin well region with simplified processing2009
Method and system for creating self-aligned twin wells with co-planar surfaces i2009
Polish stop and sealing layer for manufacture of semiconductor devices with deep2008
DMOS device with sealed channel processing2008
Electrostatic discharge (ESD) protection structure and a circuit using the same2008