{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Carrier head for a chemical mechanical polishing apparatus", "item": "https://www.patentleaderboard.com/patent/6503134"}]}
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Home › Carrier head for a chemical mechanical polishing apparatus

Carrier head for a chemical mechanical polishing apparatus

US Patent 6503134 · Granted Jan 7, 2003

Estimated economic value: $25,673,000 ⓘ

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