{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Gas laser device that emits ultraviolet rays", "item": "https://www.patentleaderboard.com/patent/6480519"}]}
Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Gas laser device that emits ultraviolet rays

Gas laser device that emits ultraviolet rays

US Patent 6480519 · Granted Nov 12, 2002

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

High voltage pulse generation device, gas laser apparatus, and electronic device2024
Laser processing method and laser processing system2023
Laser processing method and laser processing system2021
Narrow-spectrum laser device2011
Gas laser apparatus emitting ultraviolet radiation2005
ArF excimer laser devices, KrF excimer laser devices and fluorine alser devices2004
Corona preionization electrode unit for use in gas laser apparatus2003
Corona preionization electrode unit for use in gas laser apparatus2003
ArF excimer laser device and a fluoride laser device2003
Pulse oscillating gas laser device2003
ArF and KrF excimer laser apparatus and fluorine laser apparatus for lithography2003
ArF excimer laser device for exposure2003