Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Pad transfer apparatus for chemical mechanical planarization

Pad transfer apparatus for chemical mechanical planarization

US Patent 6450860 · Granted Sep 17, 2002

Estimated economic value: $1,198,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Polishing pad with built-in optical sensor2006
Polishing pad with built-in optical sensor2006
In situ feature height measurement2005
Subaperture chemical mechanical planarization with polishing pad conditioning2005
Method of preparing whole semiconductor wafer for analysis2005
Pad support method for chemical mechanical planarization2005
Device for supporting thin semiconductor wafers2005
Modular method for chemical mechanical planarization2005
Projected gimbal point drive2004
Polishing pad with built-in optical sensor2004
Combined chemical mechanical planarization and cleaning2004
Feature height measurement during CMP2003