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Home › Methylated oxide-type dielectric as a replacement for SiO2 hardmasks used in polymeric low k, dual damascene interconnect integration

Methylated oxide-type dielectric as a replacement for SiO2 hardmasks used in polymeric low k, dual damascene interconnect integration

US Patent 6440853 · Granted Aug 27, 2002

Estimated economic value: $20,123,000 ⓘ

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