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Home › Methylated oxide-type dielectric as a replacement for SiO2 hardmasks used in polymeric low K, dual damascene interconnect integration

Methylated oxide-type dielectric as a replacement for SiO2 hardmasks used in polymeric low K, dual damascene interconnect integration

US Patent 6218317 · Granted Apr 17, 2001

Estimated economic value: $18,561,000 ⓘ

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