Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for eliminating a static electricity on a semiconductor wafer

Method for eliminating a static electricity on a semiconductor wafer

US Patent 6432727 · Granted Aug 13, 2002

Estimated economic value: $2,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Exposure condition setting method, substrate processing apparatus, and computer 2013
Exposure condition setting method, substrate processing device, and computer pro2011
Apparatus having a static eliminator for manufacturing semiconductor devices and2005
Mask and method of manufacturing semiconductor device2002
Rotary cutter for mowers1988