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Home › APPARATUS FOR AND METHOD OF AUTOMATIC OPTICAL INSPECTION OF ELECTRONIC CIRCUIT BOARDS, WAFERS AND THE LIKE FOR DEFECTS, USING SKELETAL REFERENCE INSPECTION AND SEPARATELY PROGRAMMABLE ALIGNMENT TOLERANCE AND DETECTION PARAMETERS

APPARATUS FOR AND METHOD OF AUTOMATIC OPTICAL INSPECTION OF ELECTRONIC CIRCUIT BOARDS, WAFERS AND THE LIKE FOR DEFECTS, USING SKELETAL REFERENCE INSPECTION AND SEPARATELY PROGRAMMABLE ALIGNMENT TOLERANCE AND DETECTION PARAMETERS

US Patent 6427024 · Granted Jul 30, 2002

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