Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Scanning wheel for ion implantation process chamber

Scanning wheel for ion implantation process chamber

US Patent 6392245 · Granted May 21, 2002

Estimated economic value: $35,703,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

High throughput load lock for solar wafers2015
Ventilator for rapid response to respiratory disease conditions2015
Ventilator for rapid response to respiratory disease conditions2014
Method of implanting a substrate and an ion implanter for performing the method2007
Method of implanting a substrate and an ion implanter for performing the method2007
Method of implanting a substrate and an ion implanter for performing the method2007
Multi directional mechanical scanning in an ion implanter2006
Method and apparatus for implanting semiconductor wafer substrates2006
Method and apparatus for implanting semiconductor wafer substrates2006
Method of implanting a substrate and an ion implanter for performing the method2006
Multi-directional scanning of movable member and ion beam monitoring arrangement2005
Method of implanting a substrate and an ion implanter for performing the method2005