Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Electrostatic wafer clamp having electrostatic seal for retaining gas

Electrostatic wafer clamp having electrostatic seal for retaining gas

US Patent 6362946 · Granted Mar 26, 2002

Estimated economic value: $22,832,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Robotic assistance device using reduction of cognitive load of a user2025
Actuating an IoT device on a fluid tank or gas usage device remote monitoring ne2025
Indicator interpretation and remote monitoring network2025
Method of measuring ion beam angles2005
Surface structure and method of making, and electrostatic wafer clamp incorporat2005
Methods and apparatus for high speed object handling2004
Ion beam incidence angle and beam divergence monitor2004
Active electrostatic seal and electrostatic vacuum pump2003
Electrostatic wafer clamp having low particulate contamination of wafers1999