Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Wafer-pair having deposited layer sealed chambers

Wafer-pair having deposited layer sealed chambers

US Patent 6359333 · Granted Mar 19, 2002

Estimated economic value: $29,811,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Analyte detection apparatus2025
Thermopile-based flow sensing device2024
Through silicon via fabrication2023
Thermopile-based flow sensing device2023
Through silicon via fabrication2022
Compact gas sensor including a MEMS element having capillaries to facilitate gas2022
Electrochemical gas sensor constructed with MEMS fabrication technology2021
Through silicon via fabrication2020
Thermophile-based flow sensing device2020
Airflow sensor with gas composition correction2020
Robust sensing film for fire gases2019
Airflow sensor with thermal conductivity and diffusivity sensing2019