Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Microelectromechanical devices having brake assemblies therein to control movement of optical shutters and other movable elements

Microelectromechanical devices having brake assemblies therein to control movement of optical shutters and other movable elements

US Patent 6351580 · Granted Feb 26, 2002

Estimated economic value: $152,616,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Personal safety device2020
Methods of forming integrated optoelectronic devices2005
Articulated MEMS electrostatic rotary actuator2004
Articulated MEMS electrostatic rotary actuator2004
MEMS electrostatic actuators with reduced actuation voltage2004
MEMS electrostatic actuators with reduced actuation voltage2004
Microelectromechanical device having single crystalline components and metallic 2003
Methods of overplating surfaces of microelectromechanical structure2003
Method for fabricating a microelectromechanical bearing2003
Add-drop optical switches including parallel fixed and movable reflectors and me2003
Integrated optoelectronic devices having pop-up mirrors therein and methods of f2003
MEMS device members having portions that contact a substrate and associated meth2002