Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Gridded substrate transport spatula

Gridded substrate transport spatula

US Patent 6331023 · Granted Dec 18, 2001

Estimated economic value: $16,525,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate processing apparatuses and systems2018
Apparatus for delivering precursor gases to an epitaxial growth substrate2015
Rotating semiconductor processing apparatus2006
Method of processing a semiconductor wafer in a reaction chamber with a rotating2003
Rotating semiconductor processing apparatus2003
Substrate handling chamber2003
Substrate handling chamber2003
Wafer transfer arm stop2002
Dual arm linear hand-off wafer transfer assembly2002
Dual orientation leveling platform for semiconductor apparatus2002
Substrate transfer system for semiconductor processing equipment2001
Dual arm linear hand-off wafer transfer assembly2001