Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Vacuum treatment equipment

Vacuum treatment equipment

US Patent 6325856 · Granted Dec 4, 2001

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Vacuum process apparatus2008
Vacuum process apparatus2008
Sputter chamber as well as vacuum transport chamber and vacuum handling apparatu2006
Sputter chamber as well as vacuum transport chamber and vacuum handling apparatu2005
Chamber for the transport of workpieces in a vacuum atmosphere, a chamber combin2004
Method for manufacturing disk-shaped workpieces with a sputter station2004
Intermediate metallic layer for flat packing and process for the production of a2003
Vacuum treatment equipment2002
Transport and transfer device2002
Vacuum treatment system2002
Sputter station2002
Chamber, at least for the transport of workpieces, a chamber combination, a vacu2002