Assignee
Inventors
- Glen Wilk (49 patents)
- John Mark Anthony (13 patents)
- Yi Wei (21 patents)
- Robert M. Wallace (55 patents)
{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Lower temperature method for forming high quality silicon-nitrogen dielectrics", "item": "https://www.patentleaderboard.com/patent/6274510"}]}
Skip to contentUS Patent 6274510 · Granted Aug 14, 2001