Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for plasma etching

Method for plasma etching

US Patent 6274502 · Granted Aug 14, 2001

Estimated economic value: $146,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma etching method and plasma etching apparatus2009
Plasma etching apparatus and plasma etching process2007
Apparatus for plasma etching having rotating coil responsive to slide valve rota2003
Apparatus and method for plasma etching2002
Apparatus and method for plasma etching2002
Etching method and etching apparatus2001
Pattern formation method2001
Plasma generating method and apparatus1995
Plasma generating apparatus1995
Method and apparatus for generating highly dense uniform plasma in a high freque1994
Method and apparatus for generating highly dense uniform plasma by use of a high1994