Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for making a machined silicon micro-sensor

Method for making a machined silicon micro-sensor

US Patent 6251698 · Granted Jun 26, 2001

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Micro-electro-mechanical systems (MEMS)2016
Micro-machined accelerometer2012
Resonator measurement device and method employing the device2010
Micro-machined mechanical structure and device incorporating the structure2003
Micro-accelerometer with capacitive resonator2001
Micro-accelerometer with capacitive resonator2001
Accelerometer and method for making same2000
Capacitive micro-sensor with a lateral protection and manufacturing method1995
Capacitive micro-sensor with a low stray capacity and manufacturing method1995
Capacitative micro-sensor with a low stray capacity and manufacturing method1994
Pressure micro-sensor1994
Resonator micro-accelerometer1993