Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Resonator micro-accelerometer

Resonator micro-accelerometer

US Patent 5261277 · Granted Nov 16, 1993

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Microelectromechanical system and fabricating process having decoupling structur2017
Vibrating micro-system with automatic gain control loop, with integrated control2015
Device and method for correcting the aging effects of a measurement sensor2009
Micromachined inertial sensor for measuring rotational movements2007
Vibrating mass gyro2006
Micro-accelerometer with capacitive resonator2001
Method for making a machined silicon micro-sensor2001
Capacitive micro-sensor with a lateral protection and manufacturing method1995
Capacitive micro-sensor with a lateral protection and manufacturing method1995
Capacitive micro-sensor with a low stray capacity and manufacturing method1995
Capacitive micro-sensor with a low stray capacity and manufacturing method1995
Capacitative micro-sensor with a low stray capacity and manufacturing method1994