Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Hybrid alignment marks for optimal alignment of three-dimensional layers

Hybrid alignment marks for optimal alignment of three-dimensional layers

US Patent 6248484 · Granted Jun 19, 2001

Estimated economic value: $645,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Five-particle electrophoretic medium with improved black optical state2024
One step dual damascene patterning by gray tone mask2002
Tri-layer resist method for dual damascene process2001