Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6355399 | One step dual damascene patterning by gray tone mask | Zhu Sui Hua, Tsun-Lung Alex Cheng | 2002-03-12 |
| 6248484 | Hybrid alignment marks for optimal alignment of three-dimensional layers | Alex CHENG | 2001-06-19 |
| 6242344 | Tri-layer resist method for dual damascene process | Leong Tee Koh, Tsun-Lung Alex Cheng, Joseph Xie | 2001-06-05 |