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Home › Method for manufacturing a calibrated scale in the nanometer range for technical devices used for the high resolution or ultrahigh-resolution imaging of structures and such scale

Method for manufacturing a calibrated scale in the nanometer range for technical devices used for the high resolution or ultrahigh-resolution imaging of structures and such scale

US Patent 6231668 · Granted May 15, 2001

Estimated economic value: $1,993,000 ⓘ

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