Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6231668 | Method for manufacturing a calibrated scale in the nanometer range for technical devices used for the high resolution or ultrahigh-resolution imaging of structures and such scale | Rainer Loesch, Hartmut Hillmer, Armin Poecker, Walter Betz, Rainer Goebel | 2001-05-15 |