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Home › Carrier heads, planarizing machines and methods for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies

Carrier heads, planarizing machines and methods for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies

US Patent 6227955 · Granted May 8, 2001

Estimated economic value: $13,139,000 ⓘ

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