Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for preventing deposits from forming in a turbomolecular pump having magnetic or gas bearings

Method and apparatus for preventing deposits from forming in a turbomolecular pump having magnetic or gas bearings

US Patent 6224326 · Granted May 1, 2001

Estimated economic value: $6,275,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Leak detector and method for detecting leaks2020
Controlling gas partial pressures for process optimization2012
Device for fabricating a mask by plasma etching a semiconductor substrate2011
Apparatus and a method for controlling the depth of etching during alternating p2011
Controlling gas partial pressures for process optimization2010
Method and apparatus for non-aggressive plasma-enhanced vapor deposition of diel2006
Method for exploring and displaying tissue of human or animal origin from a high2005
Use of an ultrasonic transducer for echographic exploration of human or animal b2005
System for pumping low thermal conductivity gases2003
Plasma vacuum substrate treatment process and system2002
Method of anisotropic etching of substrates2002