Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Recipe design to prevent tungsten (W) coating on wafer backside for those wafers with poly Si on wafer backside

Recipe design to prevent tungsten (W) coating on wafer backside for those wafers with poly Si on wafer backside

US Patent 6191035 · Granted Feb 20, 2001

Estimated economic value: $3,398,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Semiconductor structure and manufacturing method thereof2024
Memory cell and fabricating method thereof2018
Semiconductor structure and manufacturing method thereof2016
Integrated circuit package and method for fabrication thereof2014
Integrated cirucit package and method for fabrication thereof2011
MIM structure and fabrication process with improved capacitance reliability2007
Driving method2006
Cleaning container and method for cleaning LP furnace thermocouple sleeves2004
Method of detecting and controlling in-situ faults in rapid thermal processing s2003
Apparatus for holding a quartz furnace2003
Prevent defocus issue on wafer with tungsten coating on back-side2002
Pico fuse open or short detector tool2001