Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Sputtering cathode

Sputtering cathode

US Patent 6183612 · Granted Feb 6, 2001

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Magnetron sputter cathode2014
Machine for coating a substrate, and module2011
Cooled backing plate for a sputtering target, and sputtering target comprising a2011
Method for operating a sputter cathode with a target2009
Method for the operation of an electron beam2002
Method for the operation of an electron beam2001
Sputtering device with a cathode with permanent magnet system2001
Apparatus for the coating of substrates in a vacuum chamber2001
Sputter cathode2000
Sputter cathode2000
Sputter cathode2000
Sputtering cathode based on the magnetron principle2000