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Home › Method of fabricating an oxygen-stable layer/diffusion barrier/poly bottom electrode structure for high-K DRAMS using disposable-oxide processing

Method of fabricating an oxygen-stable layer/diffusion barrier/poly bottom electrode structure for high-K DRAMS using disposable-oxide processing

US Patent 6180446 · Granted Jan 30, 2001

Estimated economic value: $121,735,000 ⓘ

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