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Home › Method of fabricating an oxygen-stable layer/diffusion barrier/poly bottom electrode structure for high-K-DRAMS using a disposable-oxide processing

Method of fabricating an oxygen-stable layer/diffusion barrier/poly bottom electrode structure for high-K-DRAMS using a disposable-oxide processing

US Patent 6171898 · Granted Jan 9, 2001

Estimated economic value: $87,380,000 ⓘ

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