Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Compact discharge pumped soft x-ray laser

Compact discharge pumped soft x-ray laser

US Patent 6167065 · Granted Dec 26, 2000

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Nano-stamp and matched reader for anti-counterfeiting applications2018
Extreme ultraviolet/soft X-ray laser nano-scale patterning using the demagnified2015
Cooling system for high average power laser2015
Extreme ultraviolet/soft X-ray laser nano-scale patterning using the demagnified2015
Nanometer-scale ablation using focused, coherent extreme ultraviolet/soft x-ray 2011
High-order harmonic generation in a capillary discharge2010
Nanometer-scale lithography using extreme ultraviolet/soft x-ray laser interfero2010
Renewable laser target2009
Increased laser output energy and average power at wavelengths below 35 nm2007
Capillary discharge x-ray laser2007
Methods and apparatus for producing soft x-ray laser in a capillary discharge pl1990
D.C. electron beam method and apparatus for continuous laser excitation1987