Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate processing unit and substrate processing apparatus using the same

Substrate processing unit and substrate processing apparatus using the same

US Patent 6155275 · Granted Dec 5, 2000

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of and apparatus for processing substrate2001
Substrate treating apparatus1996
Wafer cleaning method and apparatus therefore1994
Wafer cleaning method and apparatus therefor1992
Wafer holding mechanism1988