Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Low temperature chemical mechanical polishing of dielectric materials

Low temperature chemical mechanical polishing of dielectric materials

US Patent 6121144 · Granted Sep 19, 2000

Estimated economic value: $252,989,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method to improve precursor utilization in pulsed atomic layer processes2020
Low temperature chemical mechanical polishing of dielectric materials2004
Low temperature chemical mechanical polishing of dielectric materials2004
Use of a polish stop layer in the formation of metal structures2000
Hermetic coatings for non-silica based optical fibers1989