Assignee
- Toshiba Ceramics Co.
- Komatsu Electronic Metals Co.
- Japan Science And Technology
- Mitsubishi Materials Silicon
Inventors
- Hideo Nakanishi (38 patents)
- Susumu Maeda (49 patents)
- Keisei Abe (8 patents)
- Kazutaka Terashima (26 patents)
US Patent 6096128 · Granted Aug 1, 2000