Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Fluorine assisted stripping and residue removal in sapphire downstream plasma asher

Fluorine assisted stripping and residue removal in sapphire downstream plasma asher

US Patent 6082374 · Granted Jul 4, 2000

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Offshore platform tendon support system2024
Tendon support buoyancy system and method2024
Tendon support buoyancy system and method2023
Methods of nanowire functionalization, dispersion and attachment2018
Plasma apparatus, gas distribution assembly for a plasma apparatus and processes2013
Plasma ashing apparatus and endpoint detection process2012
Processes for monitoring the levels of oxygen and/or nitrogen species in a subst2008
Use of palladium as an adhesion layer and as an electrode in ferroelectric memor1993
Conducting electrode layers for ferroelectric capacitors in integrated circuits 1992