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Home › Diffusion simulation method for impurities using mesh points and branches utilizing concentrations of electrically active impurities and effective impurity electric field mobility

Diffusion simulation method for impurities using mesh points and branches utilizing concentrations of electrically active impurities and effective impurity electric field mobility

US Patent 6080200 · Granted Jun 27, 2000

Estimated economic value: $99,000 ⓘ

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