Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Process controller for balancing usage of tool sets

Process controller for balancing usage of tool sets

US Patent 6021360 · Granted Feb 1, 2000

Estimated economic value: $24,099,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Determining cost and processing of sensed data2017
Manufacturing management using tool operating data2014
Product release control into time-sensitive processing environments2013
System and method for querying data streams2013
Multi-modal data analysis for defect identification2012
Multi-modal data analysis for defect identification2012
Wafer identification mark2009
Wafer identification mark2009
Wafer identification mark2006
Wafer identification mark2006
Reduction of chemical mechanical planarization (CMP) scratches with sacrificial 2005
Reticle exposure matrix2003