Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › On-site ammonia purification for semiconductor manufacture

On-site ammonia purification for semiconductor manufacture

US Patent 6001223 · Granted Dec 14, 1999

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Handrail2013
Resin preconditioning methods using carbon dioxide and methods for purifying hyd2005
Method for continuously blending chemical solutions2004
Integrated method of preconditioning a resin for hydrogen peroxide purification 2003
Manufacture of high precision electronic components with ultra-high purity liqui2003
Manufacture of high precision electronic components with ultra-high purity liqui2003
Compositions for use in a chemical-mechanical planarization process2002
Ionic purifier2002
On-site generation of ultra-high-purity buffered-HF and ammonium fluoride2002
On-site generation of ultra-high-purity buffered-HF and ammonium fluoride2002
On-site manufacture of ultra-high-purity nitric acid2001
On-site manufacture of ultra-high-purity nitric acid2001