Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Recovery of perfluorinated compounds from the exhaust of semiconductor fabs using membrane and adsorption in series

Recovery of perfluorinated compounds from the exhaust of semiconductor fabs using membrane and adsorption in series

US Patent 5976222 · Granted Nov 2, 1999

Estimated economic value: $15,935,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Vibration damper having a gas-filled enveloping body2025
Pharmaceutically acceptable salts of psilocin and uses thereof2023
Pharmaceutically acceptable salts of psilocin and uses thereof2022
Lung volume reduction therapy using crosslinked non-natural polymers2018
Non-lithotripsic kidney-stone therapy2018
Electronic module and method of manufacturing the same2017
Substrate, chip arrangement, and method for manufacturing the same2017
Lung volume reduction therapy using crosslinked non-natural polymers2017
Apparatus and method for memory copy at a processor2016
Power module with cooling structure on bonding substrate for cooling an attached2016
Non-lithotripsic kidney-stone therapy2015
Method and system for autotuning of RF match2015